An analytical solution to circular touch mode capacitor

被引：44

作者：

Daigle, Maxime ^{[1
]}

Corcos, Jacques

Wu, Ke

机构：

[1] Ecole Polytech Montreal, Poly Grames Res Ctr, Montreal, PQ H3T 1E2, Canada

[2] McGill Univ, Jewish Gen Hosp, Dept Urol, Montreal, PQ H3T 1E2, Canada

来源：

IEEE SENSORS JOURNAL | 2007年 / 7卷 / 3-4期

基金：

加拿大自然科学与工程研究理事会;

关键词：

capacitive sensing; circular diaphragm; pressure sensor; touch mode;

D O I：

10.1109/JSEN.2007.891996

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, a simple but accurate analytical solution is presented to model the flexion of a circular diaphragm with clamped edges under an uniform load. The touch down effect and the evolution of touch radius are considered in this model, making it useful for touch down capacitor devices such as pressure sensors. This model is then compared to results obtained from Coventor, a finite elements analysis program designed for microelectromechanical systems.

引用

页码：502 / 505

页数：4