A new approach to grow polycrystalline CuGaSe2 thin films:: Chemical vapor deposition with I2 as transport agent

被引:13
作者
Jager-Waldau, A
Meyer, N
Weiss, T
Fiechter, S
Lux-Steiner, MC
Tempelhoff, K
Richter, W
机构
[1] Hahn Meitner Inst Kernforsch Berlin GmbH, D-14109 Berlin, Germany
[2] Tech Univ Berlin, Inst Festkorperphys, D-10623 Berlin, Germany
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1998年 / 37卷 / 3B期
关键词
compound semiconductors; CuGaSe2; thin film; CVD; thermodynamics; solar cell;
D O I
10.1143/JJAP.37.1617
中图分类号
O59 [应用物理学];
学科分类号
摘要
Polycrystalline CuGaSe2 thin films have been prepared onto glass by a chemical vapor deposition (CVD) method which uses iodine as the transport agent. The source material was a polycrystalline CuGaSe2 powder which was pressed into pellets. Single phase CuGaSe2 films were prepared in a temperature range from 460 degrees C to 560 degrees C and had grain sizes between 0.5 and 5 mu m. Thermochemical calculations were performed for the system under equilibrium conditions to model the deposition process, The necessary values for the heat of formation H-298 and the standard entropy S-298 for CuGaSe2 were estimated to be H-298 = -251 kJ/mol and S-298 = 155 J/K mol. The calculations are in good agreement with the experimental observations.
引用
收藏
页码:1617 / 1621
页数:5
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