Implantable low power integrated pressure sensor system for minimal invasive telemetric patient monitoring

被引：21

作者：

Hierold, C ^{[1
]}

Clasbrummel, B ^{[1
]}

Behrend, D ^{[1
]}

Scheiter, T ^{[1
]}

Steger, M ^{[1
]}

Oppermann, K ^{[1
]}

Kapels, H ^{[1
]}

Landgraf, E ^{[1
]}

Wenzel, D ^{[1
]}

Etzrodt, D ^{[1
]}

机构：

[1] Siemens AG, Corp Technol, D-81730 Munich, Germany

来源：

MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS | 1998年

关键词：

D O I：

10.1109/MEMSYS.1998.659820

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A new low power integrated pressure sensor system with digital output (1 bit PDM signal) for medical applications is presented. The absolute pressure sensor comprising 400 nm thick surface micromachined polysilicon membranes for capacitive pressure detection and a monolithic integrated 2(nd) order sigma-delta-modulator including voltage reference and timing generator is extremely miniaturized on an area of approximately 3 mm(2). For protection and biocompatibility reasons the sensor is coated with a silicone elastomer of up to 100 mu m thickness, which does not influence the sensor's performance. The sensor system was tested in vitro in physiological NaCl solution, showing excellent results compared to a commercially available reference sensor. The sensor system is working well down to a supply voltage of 2.2 V at a power consumption of 0.5 mW. The resolution is better than 12 bit. Due to the small chip area, low power consumption and cost effective production process, the sensor is ideal for medical applications, e.g. in combination with telemetric Fewer and data transmission [4] as an implantable sensor to reduce the mortality risk of intensive care patients.

引用

页码：568 / 573

页数：2