Ultrasensitive nanomechanical photonic sensor based on horizontal slot-waveguide resonator

被引：35

作者：

Angulo Barrios, Carlos ^{[1
]}

机构：

[1] Univ Politecn Madrid, ETSI Telecommun, Inst Sist Optoelect & Microtecnol, E-28040 Madrid, Spain

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2006年 / 18卷 / 21-24期

关键词：

integrated optics; microoptoelectromechanical systems; sensors; silicon technology;

D O I：

10.1109/LPT.2006.886824

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel integrated nanomechanical optical sensor with ultrahigh sensitivity is presented. The photonic device consists of a silicon-based disk resonator formed by a horizontal slot-waveguide acting as a circular cantilever. The overall sensitivity results from the product of the sensitivities of the slot-waveguide and the disk resonator. Calculations indicate a sensitivity as high as 33 nm(-1), which is four orders of magnitude larger than that of state-of-the-art microcantilever sensors.

引用

页码：2419 / 2421

页数：3

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