Structural transformation and field emission enhancement of carbon nanofibers by energetic argon plasma post-treatment

被引:47
作者
Weng, CH [1 ]
Leou, KC [1 ]
Wei, HW [1 ]
Juang, ZY [1 ]
Wei, MT [1 ]
Tung, CH [1 ]
Tsai, CH [1 ]
机构
[1] Natl Tsing Hua Univ, Dept Engn & Syst Sci, Hsinchu, Taiwan
关键词
D O I
10.1063/1.1815062
中图分类号
O59 [应用物理学];
学科分类号
摘要
Vertically aligned carbon nanofibers (CNFs) grown by plasma enhanced chemical vapor deposition (PECVD) were transformed into cone-shaped nanostructures after treatment by argon (Ar) plasma. Significant enhancement of field emission characteristics of the post-treated CNFs has been achieved. Analysis by electron microscopy and energy dispersive spectroscopy (EDS) suggests that the structural transformation is a result of a cosputtering/deposition process by energetic plasma ions. The enhancements can be attributed to the combining effects of an additional Si/C layer coverage, catalytic nanoparticles removal and the sharpening of CNFs tips. The argon plasma post-treatment processes developed here can be easily extended to in situ PECVD processes for fabricating CNFs based emitters. (C) 2004 American Institute of Physics.
引用
收藏
页码:4732 / 4734
页数:3
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