Metal-organic chemical vapor deposition of Sr-Co-Fe-O films on porous substrates

被引：26

作者：

Xia, CF ^{[1
]}

Ward, TL

Atanasova, P

Schwartz, RW

机构：

[1] Univ New Mexico, Dept Chem & Nucl Engn, Albuquerque, NM 87131 USA

[2] Sandia Natl Labs, Adv Mat Lab, Albuquerque, NM 87106 USA

来源：

JOURNAL OF MATERIALS RESEARCH | 1998年 / 13卷 / 01期

关键词：

D O I：

10.1557/JMR.1998.0023

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Aerosol-assisted chemical vapor deposition using the beta-diketonate precursors Sr(tmhd)(2) . 2H(2)O, Fe(tmhd)(3), and Co(tmhd)(3) was investigated for depositing thin films of the mixed-conducting ceramic SrCoyFei-yO3-delta onto porous alpha-Al2O3 substrates. Single-phase SrCoyFei-yO3-delta perovskite films were obtained at a deposition temperature of 550 degrees C and pressure of 15 mm Hg, whereas deposition at atmospheric pressure produced mixed-phase films, The Co/Fe elemental ratios in the films reflected those in the precursor solution, but the films were depleted in Sr. Reduced-pressure deposition provided a more uniform film morphology than atmospheric pressure, and led to a supported film which was leak-tight to N-2 flow.

引用

页码：173 / 179

页数：7

共 19 条

[1]

BALACHANDRAN U, 1995, AM CERAM SOC BULL, V74, P71

[2] Dense ceramic membranes for partial oxidation of methane to syngas [J].

Balachandran, U ;

Dusek, JT ;

Mieville, RL ;

Poeppel, RB ;

Kleefisch, MS ;

Pei, S ;

Kobylinski, TP ;

Udovich, CA ;

Bose, AC .

APPLIED CATALYSIS A-GENERAL, 1995, 133 (01) :19-29

[3] IMPORTANCE OF THE SURFACE EXCHANGE KINETICS AS RATE-LIMITING STEP IN OXYGEN PERMEATION THROUGH MIXED-CONDUCTING OXIDES [J].

BOUWMEESTER, HJM ;

KRUIDHOF, H ;

BURGGRAAF, AJ .

SOLID STATE IONICS, 1994, 72 (pt 2) :185-194

[4] CATALYTIC AND ELECTROCATALYTIC METHANE OXIDATION WITH SOLID OXIDE MEMBRANES [J].

ENG, D ;

STOUKIDES, M .

CATALYSIS REVIEWS-SCIENCE AND ENGINEERING, 1991, 33 (3-4) :375-412

[5]

GELLINGS PJ, 1992, CATAL TODAY, P1

[6] CATALYSIS WITH INORGANIC MEMBRANES [J].

HAROLD, MP ;

LEE, C ;

BURGGRAAF, AJ ;

KEIZER, K ;

ZASPALIS, VT ;

DELANGE, RSA .

MRS BULLETIN, 1994, 19 (04) :34-39

[7] CHEMICAL-VAPOR-DEPOSITION OF HIGH-T(C) SUPERCONDUCTING THIN-FILMS [J].

LESKELA, M ;

MOLSA, H ;

NIINISTO, L .

SUPERCONDUCTOR SCIENCE & TECHNOLOGY, 1993, 6 (09) :627-656

[8] A thermogravimetric study of the phase diagram of strontium cobalt iron oxide, SrCo0.8Fe0.2O3-delta [J].

Liu, LM ;

Lee, TH ;

Qiu, L ;

Yang, YL ;

Jacobson, AJ .

MATERIALS RESEARCH BULLETIN, 1996, 31 (01) :29-35

[9] POTENTIOSTATIC STEP TECHNIQUE TO STUDY IONIC TRANSPORT IN MIXED CONDUCTORS [J].

NISANCIOGLU, K ;

GUR, TM .

SOLID STATE IONICS, 1994, 72 :199-203

[10] FAILURE MECHANISMS OF CERAMIC MEMBRANE REACTORS IN PARTIAL OXIDATION OF METHANE TO SYNTHESIS GAS [J].

PEI, S ;

KLEEFISCH, MS ;

KOBYLINSKI, TP ;

FABER, J ;

UDOVICH, CA ;

ZHANGMCCOY, V ;

DABROWSKI, B ;

BALACHANDRAN, U ;

MIEVILLE, RL ;

POEPPEL, RB .

CATALYSIS LETTERS, 1995, 30 (1-4) :201-212

← 1 2 →