On the nanoscale measurement of friction using atomic-force microscope cantilever torsional resonances

被引:55
作者
Reinstädtler, M
Rabe, U
Scherer, V
Hartmann, U
Goldade, A
Bhushan, B
Arnold, W
机构
[1] Univ Saarbrucken, Fraunhofer Inst Nondestruct Testing, D-66123 Saarbrucken, Germany
[2] Fed Mogul, Technol Rings & Liners, D-51388 Burscheid, Germany
[3] Univ Saarland, Inst Expt Phys, D-66123 Saarbrucken, Germany
[4] Ohio State Univ, Nanotribol Lab Informat Storage, Columbus, OH 43210 USA
[5] Ohio State Univ, MEMS NEMS, Columbus, OH 43210 USA
关键词
D O I
10.1063/1.1565179
中图分类号
O59 [应用物理学];
学科分类号
摘要
We studied friction and stick-slip phenomena on bare and lubricated silicon samples by measuring the torsional contact resonances of atomic force microscope cantilevers. A piezoelectric transducer placed below the sample generates in-plane sample surface vibrations which excite torsional vibrations of the cantilever. The resonance frequencies of the vibrating beam depend on the tip-sample forces. At low lateral surface amplitudes the cantilever behaves like a linear oscillator with viscous damping. Above a critical surface amplitude, typically 0.2 nm, the amplitude maximum of the resonance curves does not increase any more and the shape of the resonance curves changes, indicating the onset of sliding friction. The critical amplitude increases with increasing static cantilever load. For a bare silicon sample it is higher than for the lubricated silicon. Microslip known from macroscopic contacts causes energy dissipation in the atomic force microscope tip-contact before sliding friction sets in. (C) 2003 American Institute of Physics.
引用
收藏
页码:2604 / 2606
页数:3
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