Liquid micromotor driven by continuous electrowetting

被引：53

作者：

Lee, JH ^{[1
]}

Kim, CJ ^{[1
]}

机构：

[1] Univ Calif Los Angeles, Dept Aerosp & Mech Engn, Los Angeles, CA 90095 USA

来源：

MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS | 1998年

关键词：

D O I：

10.1109/MEMSYS.1998.659815

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper aims to acclaim surface pension as a practical microactuation force for MEMS, by developing the ground micromachining technologies and demonstrating a few prototypes including a liquid micromotor. A mechanism caned continuous electrowetting is used to drive liquid-metal droplets along microchannels by controlling surface tension with electric potential. The paper first identifies and addresses key issues in employing this powerful surface-tension drive for MEMS throughout the design, fabrication, and testing of a simple test device, The development eventually leads us to a device called liquid micromotor, which demonstrates continuous travel of a mercury drop along a loop of microchannel. Wear-free and smooth rotation is achieved with a speed of 9.4 cm/s at a driving voltage of 10 V.

引用

页码：538 / 543

页数：2