Suppression of the leaky SAW attenuation with heavy mechanical loading

被引:26
作者
Koskela, J
Plessky, VP
Salomaa, MT
机构
[1] Helsinki Univ Technol, Phys Mat Lab, FIN-02015 HUT, Finland
[2] Micronas Semicond SA, CH-2022 Bevaix, Switzerland
关键词
D O I
10.1109/58.660154
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
We discuss effects on the propagation of surface acoustic waves (SAW) due to heavy mass loading on Y-cut lithium niobate and lithium tantalate substrates, An abrupt reduction in the leaky-SAW (LSAW) attenuation is observed in the measured admittance of a long resonator test structure on 64 degrees-YX-cut lithium niobate for aluminum electrodes of thickness h/lambda(0) beyond 9-10%. This experimental fact is explained theoretically as the slowing down of the leaky wave below the velocity of the slow shear surface-skimming bulk wave (SSBW), such that energy dissipation into bulk-wave emission becomes inhibited. An infinite transducer structure is modeled using the periodic Green's function and the boundary-element method (BEM); the computed theoretical properties well explain for the experimental findings. The model is further employed to quantify the leaky surface-wave attenuation characteristics as functions of the crystal-cut angle and the thickness of the electrodes. The resonance and antiresonance frequencies and the corresponding Q values are investigated to facilitate the selection of crystal cuts and electrode thicknesses. The transformation of the leaky SAW into a SAW-type non-leaky wave is also predicted to occur for gold electrodes, with considerably thinner finger structures.
引用
收藏
页码:439 / 449
页数:11
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