Autocollimators for deflectometry: Current status and future progress

被引：67

作者：

Geckeler, Ralf D. ^{[1
]}

Just, Andreas ^{[1
]}

Krause, Michael ^{[1
]}

Yashchuk, Valeriy V. ^{[2
]}

机构：

[1] PTB, D-38116 Braunschweig, Germany

[2] Univ Calif Berkeley, Lawrence Berkeley Lab, Adv Light Source, Berkeley, CA 94720 USA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2010年 / 616卷 / 2-3期

关键词：

Autocollimator; Angle; Angle calibration; Topography measurement; Precision metrology; Traceability; CHARGE-COUPLED-DEVICE; RESOLUTION ELECTRONIC AUTOCOLLIMATORS; NM TOPOGRAPHY MEASUREMENT; ULTRA-PRECISE MEASUREMENT; CALIBRATION;

D O I：

10.1016/j.nima.2009.11.021

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The proliferation of autocollimator-based surface profilometers at synchrotron metrology laboratories worldwide necessitates a detailed understanding of the parameters influencing their angular response. A comprehensive overview of the current status of autocollimator characterization and calibration at the Physikalisch-Technische Bundesanstalt (PTB) and its implications for their optimal application are provided. Present and future challenges to angle metrology posed by autocollimator-based surface profilometers will be delineated, and solutions and expected progress to meet them will be outlined. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：140 / 146

页数：7

共 40 条

[1]

[Anonymous], P SPIE

[2] AN UPDATED EDLEN EQUATION FOR THE REFRACTIVE-INDEX OF AIR [J].

BIRCH, KP ;

DOWNS, MJ .

METROLOGIA, 1993, 30 (03) :155-162

[3]

DEBLER E, 1980, PTB-MITT, V90, P339

[4]

Edlen B., 1966, Metrologia, V2, P71, DOI DOI 10.1088/0026-1394/2/2/002

[5] Solution to the shearing problem [J].

Elster, C ;

Weingärtner, I .

APPLIED OPTICS, 1999, 38 (23) :5024-5031

[6] Enhancement of high-resolution electronic autocollimators by application of phase grating technology [J].

Fütterer, G .

Optical Measurement Systems for Industrial Inspection IV, Pts 1 and 2, 2005, 5856 :950-959

[7]

FUTTERER G, 2007, P SPIE, V6617

[8]

FUTTERER G, 2006, Patent No. 102005018983

[9] Use and traceable calibration of autocollimators for ultra-precise measurement of slope and topography [J].

Geckeler, R ;

Weingärtner, I ;

Just, A ;

Probst, R .

RECENT DEVELOPMENTS IN TRACEABLE DIMENSIONAL MEASUREMENTS, 2001, 4401 :184-195

[10]

Geckeler R D, 2008, P SPIE, V7077

← 1 2 3 4 →