Fabrication and preliminary results for LiGA fabricated nickel micro gas chromatograph columns

High aspect ratio nickel microfluidic columns were fabricated using the LiGA technique. The 2-m-long 50-mu m-wide high aspect ratio columns will be the separation component of a I handheld gas chromatograph device for detecting semivolatile and volatile compounds. As a first step, 600-mu m-deep electrodeposited nickel columns were fabricated. The serpentine columns were sealed and pressure-flow rate characteristics compared with the theoretical values. The response of the sealed columns was studied by running methane gas plugs through uncoated columns with a flame ionization detector at the exit. Negligible flow-induced dispersion was observed in the sealed metal columns. Unretained peak widths of similar to 15 ms were measured, and the experimental pressure and flow rate distributions matched those predicted by established analytical models within +/- 2.5%. Columns were coated with OV-1 stationary phase using static coating methods. A mixture of four hydrocarbons C-6, C-8, C-10, and C-12 was separated in a coated 50 mu m by 600 mu m by 0.5 m column in less than 2 s at 70 degrees C.