Nanopatterning of graphene with crystallographic orientation control

被引:64
作者
Biro, Laszlo P. [1 ]
Lambin, Philippe [2 ]
机构
[1] Res Inst Tech Phys & Mat Sci, H-1525 Budapest, Hungary
[2] Fac Univ Notre Dame Paix, B-5000 Namur, Belgium
关键词
ATOMIC-FORCE; TAILORING GRAPHITE; HIGH-QUALITY; LITHOGRAPHY; SINGLE; LAYERS; EDGES; STM; GASIFICATION; NOMENCLATURE;
D O I
10.1016/j.carbon.2010.04.013
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The recent papers on the nanopatterning of graphene and cutting of graphene nanoribbons were reviewed. It was found that until now the simultaneous control of crystallographic orientation and of the ribbon width in the range of nanometers was possible only by scanning tunneling lithography. The cutting process by local anodic oxidation under the AFM tip is a similar process, but due to the different physical interaction mechanisms of the STM and AFM tip with the substrate, and due to the larger radius of the AFM tip, the resolution of AFM lithography is poorer. The various cutting processes based on mobile, catalytic nanoparticles yield trenches with well defined crystallographic orientation, but have a major drawback: the location of the nanoparticles and the control of the direction in which the cutting will start are currently not predictable. The first promising results of a solid phase reduction reaction of the SiO2 substrate at the graphene edge indicate the possibility of developing a new type of lithography that will allow the realization of complex nanopatterns. Recent results pointing to the possibility of the engineered modification of graphene edges may prove useful to all lithographic processes. (C) 2010 Elsevier Ltd. All rights reserved.
引用
收藏
页码:2677 / 2689
页数:13
相关论文
共 79 条
[1]   Boundary conditions for Dirac fermions on a terminated honeycomb lattice [J].
Akhmerov, A. R. ;
Beenakker, C. W. J. .
PHYSICAL REVIEW B, 2008, 77 (08)
[2]   NANOMETER-SCALE HOLE FORMATION ON GRAPHITE USING A SCANNING TUNNELING MICROSCOPE [J].
ALBRECHT, TR ;
DOVEK, MM ;
KIRK, MD ;
LANG, CA ;
QUATE, CF ;
SMITH, DPE .
APPLIED PHYSICS LETTERS, 1989, 55 (17) :1727-1729
[3]   Electronic structure and stability of semiconducting graphene nanoribbons [J].
Barone, Veronica ;
Hod, Oded ;
Scuseria, Gustavo E. .
NANO LETTERS, 2006, 6 (12) :2748-2754
[4]   Ultrathin epitaxial graphite: 2D electron gas properties and a route toward graphene-based nanoelectronics [J].
Berger, C ;
Song, ZM ;
Li, TB ;
Li, XB ;
Ogbazghi, AY ;
Feng, R ;
Dai, ZT ;
Marchenkov, AN ;
Conrad, EH ;
First, PN ;
de Heer, WA .
JOURNAL OF PHYSICAL CHEMISTRY B, 2004, 108 (52) :19912-19916
[5]   ATOMIC FORCE MICROSCOPE [J].
BINNIG, G ;
QUATE, CF ;
GERBER, C .
PHYSICAL REVIEW LETTERS, 1986, 56 (09) :930-933
[6]   SURFACE STUDIES BY SCANNING TUNNELING MICROSCOPY [J].
BINNING, G ;
ROHRER, H ;
GERBER, C ;
WEIBEL, E .
PHYSICAL REVIEW LETTERS, 1982, 49 (01) :57-61
[7]   NOMENCLATURE AND TERMINOLOGY OF GRAPHITE-INTERCALATION COMPOUNDS [J].
BOEHM, HP ;
SETTON, R ;
STUMPP, E .
CARBON, 1986, 24 (02) :241-245
[8]   NOMENCLATURE AND TERMINOLOGY OF GRAPHITE-INTERCALATION COMPOUNDS (IUPAC RECOMMENDATIONS 1994) [J].
BOEHM, HP ;
SETTON, R ;
STUMPP, E .
PURE AND APPLIED CHEMISTRY, 1994, 66 (09) :1893-1901
[9]   Carbon nanotube guided formation of silicon oxide nanotrenches [J].
Byon, Hye Ryung ;
Choi, Hee Cheul .
NATURE NANOTECHNOLOGY, 2007, 2 (03) :162-166
[10]   Anisotropic Etching and Nanoribbon Formation in Single-Layer Graphene [J].
Campos, Leonardo C. ;
Manfrinato, Vitor R. ;
Sanchez-Yamagishi, Javier D. ;
Kong, Jing ;
Jarillo-Herrero, Pablo .
NANO LETTERS, 2009, 9 (07) :2600-2604