Bottom-up soft-lithographic fabrication of three-dimensional multilayer polymer integrated optical microdevices

被引：16

作者：

Huang, YY ^{[1
]}

Paloczi, GT ^{[1
]}

Poon, JKS ^{[1
]}

Yariv, A ^{[1
]}

机构：

[1] CALTECH, Dept Appl Phys, Pasadena, CA 91125 USA

来源：

APPLIED PHYSICS LETTERS | 2004年 / 85卷 / 15期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.1802380

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We: develop a method to efficiently fabricate three-dimensional multilayer polymer microchips for integrated optical applications. This method uses soft lithography to mold the core structures on top of the cladding, layers. By repeating the process, a three-dimensional multilayer integrated optical microdevice, which consists of several layers of individual planar optical devices, is fabricated. We demonstrate a dual-layer microring resonator optical filter device where the devices in the different layers show essentially identical transmission responses. (C) 2004 American Institute of Physics.

引用

页码：3005 / 3007

页数：3

共 20 条

[1]

Nanoimprinting over topography and multilayer three-dimensional printing [J].