A method for calibrating the line-focus-beam acoustic microscopy system

被引：54

作者：

Kushibiki, J ^{[1
]}

Arakawa, M ^{[1
]}

机构：

[1] Tohoku Univ, Dept Elect Engn, Sendai, Miyagi 98077, Japan

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 1998年 / 45卷 / 02期

关键词：

D O I：

10.1109/58.660152

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

Absolute accuracy of the line-focus-beam (LFB) acoustic microscopy system is investigated for measurements of the leaky surface acoustic wave (LSAW) velocity and attenuation, and a method of system calibration is proposed. In order to discuss the accuracy, it is necessary to introduce a standard specimen whose bulk acoustic properties, (e.g., the independent elastic constants and density) are measured with high accuracy. Single crystal substrates of gadolinium gallium garnet (GGG) are taken as standard specimens. The LSAW propagation characteristics are measured and compared with the calculated results using the measured bulk acoustic properties. Calibration is demonstrated for the system using two LFB acoustic lens devices with a cylindrical concave surface of 1-mm radius in the frequency range 100 to 300 MHz.

引用

页码：421 / 430

页数：10

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