Fabrication of silica nanotube arrays from vertical silicon nanowire templates

被引：249

作者：

Fan, R

Wu, YY

Li, DY

Yue, M

Majumdar, A

Yang, PD ^{[1
]}

机构：

[1] Univ Calif Berkeley, Dept Chem, Berkeley, CA 94720 USA

[2] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA

来源：

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY | 2003年 / 125卷 / 18期

关键词：

D O I：

10.1021/ja034163+

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A simple thermal oxidation-etching process was developed to translate vertical silicon nanowire arrays into silica nanotube arrays. The obtained nanotubes perfectly retain the orientation of original silicon nanowire arrays. The inner tube diameter ranges from 10 to 200 nm. High-temperature oxidation produces relative thick, rigid, and pinhole-free walls that are made of condensed silica. This method could be useful for fabrication of single nanotube sensors and nanofluidic systems. Copyright © 2003 American Chemical Society.

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页码：5254 / 5255

页数：2

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