Improved fabrication approach for carbon nanotube probe devices

被引:82
作者
Stevens, R [1 ]
Nguyen, C [1 ]
Cassell, A [1 ]
Delzeit, L [1 ]
Meyyappan, M [1 ]
Han, J [1 ]
机构
[1] NASA, Ames Res Ctr, Moffett Field, CA 94035 USA
关键词
D O I
10.1063/1.1328046
中图分类号
O59 [应用物理学];
学科分类号
摘要
An improved process is developed for simple and efficient fabrication of carbon nanotube probe devices. This process requires only two steps to make nanotube probes. First a nanotube cartridge is created using chemical vapor deposition, then the nanotubes are transferred from the cartridge to a device using an electric field. Multiwall nanotube probes are made into different device geometries in this approach. Their applications are illustrated by atomic force microscopy imaging of the surface of a terrestrial rock granule selected to simulate the morphology and consistency of a grain of Mars dust and nanolithography on a silicon substrate. [S0003-6951(00)04347-3].
引用
收藏
页码:3453 / 3455
页数:3
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