A post-column imaging energy filter with a 20482-pixel slow-scan CCD camera

被引：9

作者：

Gubbens, AJ

Brink, HA

Kundmann, MK

Friedman, SL

Krivanek, OL

机构：

[1] KLA Tencor, San Jose, CA 95134 USA

[2] Gatan Inc, Pleasanton, CA 94588 USA

[3] Stanford Univ, Ctr Mat Res, Stanford, CA 94305 USA

[4] Univ Washington, Dept Mat Sci & Engn, Seattle, WA 98195 USA

来源：

MICRON | 1998年 / 29卷 / 01期

关键词：

energy filtering; EFTEM; post-column; imaging energy filter; slow-scan CCD camera;

D O I：

10.1016/S0968-4328(97)00075-9

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

A new post-column imaging energy filter with a 2048(2)-pixel slow-scan CCD camera is described. The filter incorporates improved electron optics and a new graphical user interface. The operation of the filter has largely been automated, both in regular operation and during the filter's installation. (C) 1998 Published by Elsevier Science Ltd. All rights reserved.

引用

页码：81 / 87

页数：7

共 10 条

[1]

Egerton R. F, 1996, ELECT ENERGY LOSS SP

[2] AN IMAGING FILTER FOR HIGH-VOLTAGE ELECTRON-MICROSCOPY [J].

GUBBENS, AJ ;

KRAUS, B ;

KRIVANEK, OL ;

MOONEY, PE .

ULTRAMICROSCOPY, 1995, 59 (1-4) :255-265

[3] APPLICATIONS OF SLOW-SCAN CCD CAMERAS IN TRANSMISSION ELECTRON-MICROSCOPY [J].

KRIVANEK, OL ;

MOONEY, PE .

ULTRAMICROSCOPY, 1993, 49 (1-4) :95-108

[4] DESIGN AND 1ST APPLICATIONS OF A POSTCOLUMN IMAGING FILTER [J].

KRIVANEK, OL ;

GUBBENS, AJ ;

DELLBY, N ;

MEYER, CE .

MICROSCOPY MICROANALYSIS MICROSTRUCTURES, 1992, 3 (2-3) :187-199

[5] DEVELOPMENTS IN EELS INSTRUMENTATION FOR SPECTROSCOPY AND IMAGING [J].

KRIVANEK, OL ;

GUBBENS, AJ ;

DELLBY, N .

MICROSCOPY MICROANALYSIS MICROSTRUCTURES, 1991, 2 (2-3) :315-332

[6] AN IMAGING FILTER FOR BIOLOGICAL APPLICATIONS [J].

KRIVANEK, OL ;

FRIEDMAN, SL ;

GUBBENS, AJ ;

KRAUS, B .

ULTRAMICROSCOPY, 1995, 59 (1-4) :267-282

[7]

KRIVANEK OL, 1994, ELECTRON MICROSCOPY 1994, VOL 1, P167

[8]

KRUIT P, 1995, ULTRAMICROSCOPY, V59, P1

[9]

LANIO S, 1986, OPTIK, V73, P56

[10] Design of an omega filter for a 200 kV electron microscope [J].

Tsuno, K ;

Munro, E .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1997, 68 (01) :109-115

← 1 →