Retention and switching kinetics of protonated gate field-effect transistors

被引:2
作者
Devine, RAB [1 ]
Herrera, GV [1 ]
机构
[1] Univ New Mexico, Ctr High Technol Mat, Albuquerque, NM 87106 USA
关键词
D O I
10.1063/1.1287126
中图分类号
O59 [应用物理学];
学科分类号
摘要
The switching and memory retention time has been measured in 50 mu m gate-length "pseudo" nonvolatile memory metal-oxide-semiconductor field-effect transistors containing protonated 40 nm gate oxides. Times of the order of 3.3 s are observed for fields of 3 MV cm(-1). The retention time with protons placed either at the gate oxide/substrate or gate oxide/gate electrode interfaces is found to be better than 96% after 5000 s. Measurement of the time dependence of the source-drain current during switching provides clear evidence for the presence of dispersive proton transport through the gate oxide. (C) 2000 American Institute of Physics. [S0021-8979(00)00317-0].
引用
收藏
页码:2862 / 2867
页数:6
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