Synthesis of fault-tolerant supervisor for automated manufacturing systems: A case study on photolithographic process

被引：32

作者：

Cho, KH ^{[1
]}

Lim, JT ^{[1
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Elect Engn, Taejon 305701, South Korea

来源：

IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION | 1998年 / 14卷 / 02期

关键词：

discrete event dynamic systems; fault-tolerance; photolithographic process; supervisor;

D O I：

10.1109/70.681255

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

In this paper, a discrete event dynamic system (DEDS) approach is utilized to improve the reliability of a system from the fault-tolerance viewpoint. We propose a systematic way to classify faults and failures quantitatively and to find tolerable fault event sequences embedded in DEDS's. After this, the synthesis of a fault-tolerant supervisory control system is investigated. A case study of a photolithographic process in a semiconductor manufacturing system is provided to illustrate these techniques.

引用

页码：348 / 351

页数：4

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