Kinetics of evaporation of Cu beaded films on sapphire

被引:6
作者
Beszeda, I
Ealet, B
Gontier-Moya, E
Beke, DL
Erdelyi, G
机构
[1] Lajos Kossuth Univ, Dept Solid State Phys, H-4010 Debrecen, Hungary
[2] Fac Sci & Tech St Jerome, Lab SERMEC, F-13397 Marseille, France
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1998年 / 66卷 / 01期
关键词
D O I
10.1007/s003390050643
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Kinetics of evaporation of beaded Cu films from a sapphire substrate at 2-3 x 10(-8) mbar were investigated by means of Auger electron spectroscopy in the temperature range 893-978 K. Measuring the time dependence of the normalized Auger intensity of Cu, we concluded that the process is controlled by a surface reaction at the perimeters of beads. From the temperature dependence of the initial and final parts of these curves we were able to determine the energy of activation of the desorption of Cu and of the surface reaction as well.
引用
收藏
页码:93 / 98
页数:6
相关论文
共 10 条
  • [1] AYLARD G, 1994, SI CHEM DATA
  • [2] DETERMINATION OF PARAMETERS OF SURFACE MASS-TRANSPORT FROM MORPHOLOGICAL-CHANGES OF BEADED THIN-FILMS
    BEKE, DL
    KAGANOVSKII, YS
    [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1995, 32 (03): : 185 - 199
  • [3] Determination of parameters of surface mass transport of Ni on sapphire from the kinetics of morphological change of beaded films caused by evaporation
    Beszeda, I
    Beke, DL
    Tokei, Z
    Erdelyi, G
    [J]. DEFECT AND DIFFUSION FORUM, 1997, 143 : 1527 - 1532
  • [4] Determination of parameters of Cu surface mass transport on sapphire from morphological changes of beaded films caused by evaporation
    Beszeda, I
    Beke, DL
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1997, 64 (06): : 583 - 588
  • [5] Kinetics of evaporation of beaded Ag film on sapphire and on alumina scale
    Erdelyi, G
    Barkoczi, M
    Moya, E
    Giordano, H
    Beszeda, I
    Aufray, B
    Beke, DL
    [J]. JOURNAL OF APPLIED PHYSICS, 1996, 80 (03) : 1474 - 1479
  • [6] Geguzin Ya.E., 1984, Diffusion Processes on a Crystal Surface
  • [7] KINETICS OF EVAPORATION OF BEADED THIN-FILMS
    KAGANOVSKII, YS
    BEKE, DL
    YURCHENKO, SP
    [J]. SURFACE SCIENCE, 1994, 319 (1-2) : 207 - 218
  • [8] KINETICS OF DISSOLUTION OF BEADED FILMS INTO SINGLE-CRYSTAL
    KAGANOVSKII, YS
    BEKE, DL
    [J]. SURFACE SCIENCE, 1993, 298 (01) : 18 - 28
  • [9] SIMS STUDY OF COPPER DIFFUSION INTO BULK ALUMINA
    MOYA, F
    MOYA, EG
    JUVE, D
    TREHEUX, D
    GRATTEPAIN, C
    AUCOUTURIER, M
    [J]. SCRIPTA METALLURGICA ET MATERIALIA, 1993, 28 (03): : 343 - 348
  • [10] NICHOLAS MG, 1987, FUNDAMENTALS DIFFUSI, P25