PVPF control of piezoelectric tube scanners

被引：55

作者：

Bhikkaji, B. ^{[1
]}

Ratnam, M. ^{[1
]}

Moheimani, S. O. R. ^{[1
]}

机构：

[1] Univ Newcastle, Sch Elect Engn & Comp Sci, Newcastle, NSW 2308, Australia

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2007年 / 135卷 / 02期

基金：

澳大利亚研究理事会;

关键词：

piezoelectric tube; system identification; resonance; damping; feedback control; pole placement;

D O I：

10.1016/j.sna.2006.07.032

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

As in most applications of nanotechnology, speed and precision are important requirements for getting good topographical maps of material surfaces using Scanning Tunneling Microscopes (STM) and Atomic Force Microscopes (AFM). Many STMs and AFMs use piezoelectric tubes for scanning and positioning with nanometer msolution. In this work a piezoelectric tube of the type typically used in STMs and AFMs is considered. Scanning using this piezoelectric tube is hampered by the presence of a low-frequency resonance mode that is easily excited to produce unwanted vibrations. The presence of this low-frequency resonance mode restricts the scanning speed of the piezoelectric tube. Concept of a Positive Velocity and Position Feedback (PVPF) controller is introduced and a controller is designed to damp this undesired resonance mode. To achieve good precision, inputs are then shaped for the closed loop system to track a raster pattern. Experimental results reveal a significant damping of the resonance mode of interest, and consequently, a good tracking performance. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：700 / 712

页数：13

共 23 条

[1]

[Anonymous], P 2 IFAC C MECH SYST

[2]

Bhushan B., 2004, SPRINGER HDB NANOTEC

[3] ATOMIC FORCE MICROSCOPE [J].

BINNIG, G ;

QUATE, CF ;

GERBER, C .

PHYSICAL REVIEW LETTERS, 1986, 56 (09) :930-933

[4] SURFACE STUDIES BY SCANNING TUNNELING MICROSCOPY [J].

BINNING, G ;

ROHRER, H ;

GERBER, C ;

WEIBEL, E .

PHYSICAL REVIEW LETTERS, 1982, 49 (01) :57-61

[5]

CAUGHEY TK, 1982, DYNL823 CAL I TECHN

[6] Self-sensing magnetic levitation using a LC resonant circuit [J].

Choi, C ;

Park, K .

SENSORS AND ACTUATORS A-PHYSICAL, 1999, 72 (02) :169-177

[7]

Daniele A., 1999, Proceedings of the 1999 American Control Conference (Cat. No. 99CH36251), P253, DOI 10.1109/ACC.1999.782779

[8]

DOSCH JJ, 1992, PROCEEDINGS OF THE 31ST IEEE CONFERENCE ON DECISION AND CONTROL, VOLS 1-4, P1815, DOI 10.1109/CDC.1992.371116

[9]

El Rifai OM, 2001, P AMER CONTR CONF, P3251, DOI 10.1109/ACC.2001.946423

[10] POSITIVE POSITION FEEDBACK-CONTROL FOR LARGE SPACE STRUCTURES [J].

FANSON, JL ;

CAUGHEY, TK .

AIAA JOURNAL, 1990, 28 (04) :717-724

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