Complementary model for intrinsic time-dependent dielectric breakdown in SiO2 dielectrics

被引:151
作者
McPherson, JW [1 ]
Khamankar, RB [1 ]
Shanware, A [1 ]
机构
[1] Texas Instruments Inc, Dallas, TX 75243 USA
关键词
D O I
10.1063/1.1318369
中图分类号
O59 [应用物理学];
学科分类号
摘要
A molecular physics-based complementary model, which includes both field and current, is introduced to help resolve the E versus 1/E-model controversy that has existed for many years as to the true physics behind time-dependent dielectric breakdown (TDDB). It is shown here that either TDDB model can be valid for certain specified field, temperature, and molecular bonding-energy ranges. For bond strengths < 3 eV, the bond breakage rate is generally dominated by field-enhanced thermal processes and the E model is valid. For bond strengths > 3 eV, the bond breakage must be hole catalyzed by current-induced hole injection and capture. Under these conditions, the TDDB physics is described well by the 1/E model. (C) 2000 American Institute of Physics. [S0021-8979(00)08722-3].
引用
收藏
页码:5351 / 5359
页数:9
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