Scanning electron microscope with polarization analysis: Micromagnetic structures in ultrathin films

被引:13
作者
Oepen, HP
Steierl, G
Kirschner, J
机构
[1] Univ Hamburg, Inst Appl Phys, D-20355 Hamburg, Germany
[2] Univ Hamburg, Microstruct Adv Res Ctr, D-20355 Hamburg, Germany
[3] Max Planck Inst Microstruct Phys, D-0620 Halle An Der Saale, Germany
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2002年 / 20卷 / 06期
关键词
D O I
10.1116/1.1519863
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The basics of the scanning electron microscope with polarization analysis are presented and special features of the microscope are discussed. The spin polarization of the secondary electrons allows for a high contrast as the topography of the sample is strongly suppressed. The feature of the method is that the orientation of the magnetization is measured and used for domain imaging. For complex domain patterns that makes the interpretation easy and direct. Examples are shown how the high surface sensitivity is used for the investigation of all kind of samples. The decoration by a thin ferromagnetic film makes even contaminated and samples with strongly spoiled surfaces accessible for scanning electron microscope with polarization analysis (SEMPA) investigation. Recently, the magnetic resolution of SEMPA has been pushed into the range of a few nm. (C) 2002, American Vacuum Society.
引用
收藏
页码:2535 / 2538
页数:4
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