The Diamond-NOM: A non-contact profiler capable of characterizing optical figure error with sub-nanometre repeatability

被引：142

作者：

Alcock, S. G. ^{[1
]}

Sawhney, K. J. S. ^{[1
]}

Scott, S. ^{[1
]}

Pedersen, U. ^{[1
]}

Walton, R. ^{[1
]}

Siewert, F. ^{[2
]}

Zeschke, T. ^{[2
]}

Senf, F. ^{[2
]}

Noll, T. ^{[2
]}

Lammert, H. ^{[2
]}

机构：

[1] Diamond Light Source Ltd, Oxford OX11 0DE, England

[2] Helmholtz Zentrum Berlin BESSY II, D-12489 Berlin, Germany

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2010年 / 616卷 / 2-3期

关键词：

Diamond-NOM; Metrology; Optical testing; Pentaprism; Autocollimator; Synchrotron; X-ray optics;

D O I：

10.1016/j.nima.2009.10.137

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We present design and implementation details of the Diamond-NOM (nanometre optical metrology)-a non-contact profiler capable of measuring the surface topography of large (up to 1500 mm long) and heavy (up to 150 kg) optical assemblies with sub-nanometre resolution and repeatability. These levels of performance are essential to fabricate and optimize next generation optics. The capabilities of the Diamond-NOM have already enabled collaborations with optic manufacturers, including production of a preferentially deposited, large (1.2 m), synchrotron mirror with a slope error of similar to 0.44 mu rad rms and using bimorph technology to reduce figure error of a super-polished (elastic emission machining) optic to <1 nm peak to valley. We demonstrate that the BESSY-NOM scanning pentaprism and autocollimator concept is robust, easily transferable, and repeatable. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：224 / 228

页数：5

共 9 条

[1]

ALCOCK SG, 2007, P SOC PHOTO-OPT INS, P6704

[2] Future metrology needs for synchrotron radiation grazing-incidence optics [J].