High electric field photocurrent of Vidicon and diode devices using wide band gap a-Si:H prepared with intentional control of silicon network by chemical annealing

被引:6
作者
Futako, W [1 ]
Sugawara, T [1 ]
Kamiya, T [1 ]
Shimizu, I [1 ]
机构
[1] Tokyo Inst Technol, Grad Sch Nagatsuta, Midori Ku, Yokohama, Kanagawa 2268502, Japan
基金
日本学术振兴会;
关键词
a-Si : H; band gap tuning; chemical annealing; structural relaxation; avalanche multiplication; Vidicon;
D O I
10.1016/S0022-328X(00)00399-5
中图分类号
O61 [无机化学];
学科分类号
070301 ; 081704 ;
摘要
Wide band gap amorphous silicon (a-Si:H) were prepared by a chemical annealing (CA) technique, in which intermittent hydrogen plasma treatment was repeated during the deposition of a-Si:H. Electronic transport in the wide band gap a-Si:H at high electric field was investigated systematically using devices with Vidicon-type or n-i-p diode structures. The Vidicon-type image pick-up tube exhibited the potential to produce high resolution images, demonstrating that the wide-gap a-Si:H prepared by the CA had superior properties suitable for imaging devices. The electric fields as high as > 8 x 10(5) V cm(-1) were applied successfully on the n-i-p devices using a-SiN:H for electron blocking contact. However, this electric field was not sufficient to invoke avalanche multiplication. (C) 2000 Elsevier Science S.A. All nights reserved.
引用
收藏
页码:525 / 530
页数:6
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