Simple, three-dimensional microfabrication of electrodeposited structures

被引:23
作者
LaVan, DA
George, PM
Langer, R [1 ]
机构
[1] MIT, Dept Chem Engn, Cambridge, MA 02139 USA
[2] MIT, Div Hlth Sci & Technol, Cambridge, MA 02139 USA
关键词
electrodeposition; nickel; photolithography polypyrrole; self-assembly;
D O I
10.1002/anie.200390323
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
A simplified preparation of three-dimensional microfabricated structures requires only a small number of experimental steps and a single photolithographic mask. The process has been used to mimic microfluidic vascular networks (see picture) and can be achieved with such diverse materials as pure nickel and polypyrrole, thus allowing for great diversity in the asprepared devices.
引用
收藏
页码:1262 / 1265
页数:4
相关论文
共 18 条
[1]  
Becker E. W., 1986, Microelectronic Engineering, V4, P35, DOI 10.1016/0167-9317(86)90004-3
[2]   Microstructural and mechanical properties investigation of electrode posited and annealed LIGA nickel structures [J].
Buchheit, TE ;
LaVan, DA ;
Michael, JR ;
Christenson, TR ;
Leith, SD .
METALLURGICAL AND MATERIALS TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 2002, 33 (03) :539-554
[3]   ELECTROCHEMICAL POLYMERIZATION OF PYRROLE [J].
DIAZ, AF ;
KANAZAWA, KK ;
GARDINI, GP .
JOURNAL OF THE CHEMICAL SOCIETY-CHEMICAL COMMUNICATIONS, 1979, (14) :635-636
[4]   Rapid prototyping of microfluidic systems in poly(dimethylsiloxane) [J].
Duffy, DC ;
McDonald, JC ;
Schueller, OJA ;
Whitesides, GM .
ANALYTICAL CHEMISTRY, 1998, 70 (23) :4974-4984
[5]   Cell placement and neural guidance using a three-dimensional microfluidic array [J].
Griscom, L ;
Degenaar, P ;
LePioufle, B ;
Tamiya, E ;
Fujita, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (9A) :5485-5490
[6]   Three-dimensional microfluidic confinement for efficient sample delivery to biosensor surfaces. Application to immunoassays on planar optical waveguides [J].
Hofmann, O ;
Voirin, G ;
Niedermann, P ;
Manz, A .
ANALYTICAL CHEMISTRY, 2002, 74 (20) :5243-5250
[7]   Fabrication of three-dimensional microfluidic systems by stacking molded polydimethylsiloxane(PDMS) layers [J].
Jo, BH ;
Beebe, DJ .
MICROFLUIDIC DEVICES AND SYSTEMS II, 1999, 3877 :222-229
[8]   Micromolding in capillaries: Applications in materials science [J].
Kim, E ;
Xia, YN ;
Whitesides, GM .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1996, 118 (24) :5722-5731
[9]   PATTERNED SELF-ASSEMBLED MONOLAYERS AND MESOSCALE PHENOMENA [J].
KUMAR, A ;
ABBOTT, NL ;
KIM, E ;
BIEBUYCK, HA ;
WHITESIDES, GM .
ACCOUNTS OF CHEMICAL RESEARCH, 1995, 28 (05) :219-226
[10]   Transport and kinetics in electroactive polymers [J].
Lyons, MEG .
ADVANCES IN CHEMICAL PHYSICS, VOL XCIV: POLYMERIC SYSTEMS, 1996, 94 :297-624