A vacuum gauge with microtips:: the ⟪orbitip⟫ gauge

被引：16

作者：

Baptist, R ^{[1
]}

机构：

[1] CEA Technol Avancees, LETI, F-38054 Grenoble, France

来源：

VACUUM | 1997年 / 48卷 / 7-9期

关键词：

D O I：

10.1016/S0042-207X(97)00037-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A novel type of ionisation gauge equipped with a microtip cathode is described and its advantages compared to those of the Bayard-Alpert gauge are presented. In particular, if is shown that the sensitivity of the gauge is greatly increased. (C) 1997 Elsevier Science Ltd.

引用

页码：723 / 725

页数：3

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ALPERT, D .

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[3]

DAHL DA, 1988, SIMION VERSION 4 0

[4] PERFORMANCE STUDY OF ORBITRON IONIZATION GAUGE [J].

MEYER, EA ;

HERB, RG .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1967, 4 (02) :63-&

[5]

MEYER R, 1991, IVMC 91, P6

[6]

REDHEAD PA, 1968, PHYSICAL BASIS ULTRA

[7]

ROBINSON NW, 1968, PHYSICAL PRINCIPLES

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