Flexible thin film temperature and strain sensor array utilizing a novel sensing concept

被引：74

作者：

Lichtenwalner, Daniel J. ^{[1
]}

Hydrick, Aaron E. ^{[1
]}

Kingon, Angus I. ^{[1
]}

机构：

[1] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2007年 / 135卷 / 02期

关键词：

thin film sensor array; temperature sensor; strain gage; Pt; NiCr; polyimide;

D O I：

10.1016/j.sna.2006.07.019

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Flexible arrays of resistive temperature and strain sensors have been designed, and fabricated on polyimide sheets. We describe a novel sensor design concept, utilizing materials selection combined with specific device layout design, such that both temperature and strain values can be determined from resistance values of parallel sensor pairs, regardless of complex strain fields or temperature distribution. Fabrication of thin film Pt and NiCr resistive sensor arrays, with Cu conducting lines, on polyimide demonstrates the sensing concept. Temperature and strain sensing capabilities are demonstrated for temperatures up to 200 degrees C and up to 2% tensile strain. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：593 / 597

页数：5

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