Development of a new type piezoelectric micromotor

被引：8

作者：

Tani, K ^{[1
]}

Suzuki, M ^{[1
]}

Furuta, K ^{[1
]}

Sakahara, T ^{[1
]}

Ataka, T ^{[1
]}

机构：

[1] Seiko Instruments Inc, Corp R&D, Matsudo, Chiba 271, Japan

来源：

MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS | 1998年

关键词：

D O I：

10.1109/MEMSYS.1998.659789

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

We designed and fabricated a piezoelectric micromotor which has a new structure suited for miniaturization. The prototype piezoelectric micromotor we fabricated has 2 mm in diameter and 2 mm in height. It consists of a disk-shaped rotor, a cantilever slater and several oscillators with elements made by PZT ceramics. These elements are integrated into the prototype piezoelectric micromotor in a flat configuration. The rotor rotates at 50 to 450 rpm and a drive voltage ranging from 2 to 10 V-pp.

引用

页码：396 / 401

页数：2