Summary of ISO/TC 201 standard:: XXII.: ISO 22048: 2004 -: Surface chemical analysis -: Information format for static secondary ion mass spectrometry

被引：5

作者：

Gilmore, IS

Seah, MP ^{[1
]}

Henderson, A

机构：

[1] Natl Phys Lab, Qual Life Div, Teddington TW11 0LW, Middx, England

[2] SurfaceSpectra Ltd, Manchester M60 2LQ, Lancs, England

来源：

SURFACE AND INTERFACE ANALYSIS | 2004年 / 36卷 / 13期

关键词：

SIMS; secondary ion mass spectrometry; secondary ion; data transfer format; time of flight; ToF; mass scale;

D O I：

10.1002/sia.2001

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

This International Standard provides a digital format to store and transfer between computers, in a compact way, important calibration and instrumental parameter data necessary to make effective use of spectral data files from static SIMS instruments. This format is designed to supplement the data transfer format specified in ISO 14976. (C) Crown Copyright 2004. Reproduced with the permission of Her Majesty's Stationary Office. Published by John Wiley Sons Ltd.

引用

页码：1642 / 1644

页数：3