Nanoimprint- and UV-lithography: Mix&Match process for fabrication of interdigitated nanobiosensors

被引：56

作者：

Montelius, L ^{[1
]}

Heidari, B ^{[1
]}

Graczyk, M ^{[1
]}

Maximov, I ^{[1
]}

Sarwe, EL ^{[1
]}

Ling, TGI ^{[1
]}

机构：

[1] Univ Lund, Dept Phys, Div Solid State Phys, S-2100 Lund, Sweden

来源：

MICROELECTRONIC ENGINEERING | 2000年 / 53卷 / 1-4期

关键词：

1.1 Why nano ? There is today a clear trend in analytical chemistry to handle small amounts of analytes in order to be cost effective and to be able to make a thorough determination of the analyte using a multi-sensor array system. The smaller the biosensor is; the lesser amount of analyte is needed for an analysis. Furthermore; sensors for use in the medical and food areas are often required to be disposable. It is thus clear that there exists a demand to fabricate smaller and smaller detection systems in a cost-efficient way. The approach we have taken is to make interdigitated finger structures having a pitch varying between 100 and 500 nm. The signal strength that can be obtained with an interdigitated structure having a given footprint area can easily be shown to scale * Corresponding author. * Financial support from the Swedish Strategic Research Council and the European Union Microelectronic Advanced Research Initiative (MEL-ARI) in the ESPRIT project 28765 Nanotech is gratefully acknowledged;

D O I：

10.1016/S0167-9317(00)00369-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A complete nanobiosensor structure consisting of a 200 mu m x 200 mu m area containing 100 nm sized interdigitated nanoelectrodes with varied interelectrode distances has been fabricated using nanoimprint lithography (NIL) in combination with UV-lithography. The complete structure has been characterized with admittance spectroscopy. In the paper are discussed the needs and key issues for nanosensors and the capability offered by using NIL for fabrication of such sensors.

引用

页码：521 / 524

页数：4

共 4 条

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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (03) :1755-1760

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