[1] Forschungszentrum Karlsruhe, Inst Biol Interfaces, D-76344 Eggenstein Leopoldshafen, Germany
[2] Tech Univ Ilmenau, Inst Micro & Nanotechnol, Ctr Innovat Competence Macronano, D-98684 Ilmenau, Germany
[3] Atotech Deutsch GmbH, D-10553 Berlin, Germany
[4] Forschungszentrum Karlsruhe, Inst Microstruct Technol, D-76344 Eggenstein Leopoldshafen, Germany
[5] Forschungszentrum Karlsruhe, Inst Mat Res 3, D-76344 Eggenstein Leopoldshafen, Germany
[6] Forschungszentrum Karlsruhe, Inst Micro Proc Engn, D-76344 Eggenstein Leopoldshafen, Germany
[7] Draeger Med AG & Co KG, D-23542 Lubeck, Germany
[8] Forschungszentrum Karlsruhe, Inst Mat Res 1, D-76344 Eggenstein Leopoldshafen, Germany
[9] Leibniz Inst Plant Genet & crop Plant Res, In Vitro Differentiat Grp, D-06466 Gatersleben, Germany