Micromachined accelerometer with no proof mass

被引：63

作者：

Leung, AM ^{[1
]}

Jones, J ^{[1
]}

Czyzewska, E ^{[1
]}

Chen, JM ^{[1
]}

Pascal, M ^{[1
]}

机构：

[1] Simon Fraser Univ, Sch Engn Sci, Burnaby, BC V5A 1S6, Canada

来源：

INTERNATIONAL ELECTRON DEVICES MEETING - 1997, TECHNICAL DIGEST | 1997年

关键词：

D O I：

10.1109/IEDM.1997.650526

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes a revolutionary micromachined accelerometer which is simple, reliable, and inexpensive to make. The operating principle of this accelerometer is based on free-convection heat transfer of a tiny hot air bubble in an enclosed chamber. An experimental device has demonstrated a 0.6 milli-g sensitivity which can theoretically be extended to sub-micro-g level.

引用

页码：899 / 902

页数：4