Probing photonic and optoelectronic structures by apertureless scanning near-field optical microscopy

被引:21
作者
Bachelot, R [1 ]
Lerondel, G [1 ]
Blaize, S [1 ]
Aubert, S [1 ]
Bruyant, A [1 ]
Royer, P [1 ]
机构
[1] Univ Technol Troyes, CNRS, FRE 2671, LNIO, F-10010 Troyes, France
关键词
integrated optics; SNOM; NSOM; near-field optics; apertureless; photonic structure; optoelectronics; scanning near-field optical microscopy and spectroscopy; waveguide; semiconductor lasers;
D O I
10.1002/jemt.20102
中图分类号
R602 [外科病理学、解剖学]; R32 [人体形态学];
学科分类号
100101 ;
摘要
This report presents the Apertureless Scanning Optical Near-Field Microscope as a powerful tool for the characterization of modern optoelectronic and photonic components with sub-wavelength resolution. We present an overview of the results we obtained in our laboratory over the past few years. By significant examples, it is shown that this specific probe microscopy allows for in situ local quantitative study of semiconductor lasers in operation, integrated optical waveguides produced by ion exchange (single channel or Y junction), and photonic structures. (C) 2004 Wiley-Liss. Inc.
引用
收藏
页码:441 / 452
页数:12
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