Electron-beam-induced damage in wurtzite InN

被引：32

作者：

Mkhoyan, KA ^{[1
]}

Silcox, J ^{[1
]}

机构：

[1] Cornell Univ, Sch Appl & Engn Phys, Ithaca, NY 14853 USA

来源：

APPLIED PHYSICS LETTERS | 2003年 / 82卷 / 06期

关键词：

D O I：

10.1063/1.1543642

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Knock-on type damage with ejection of nitrogen atoms from a sample was observed in wurtzite InN during irradiation by 100 keV electron beam in scanning transmission electron microscope. Comparison of the measured integrated intensities of nitrogen K and indium M-4,M-5 edges with calculated mass-loss provided a method to measure the energy of vacancy-enhanced displacement in InN for nitrogen atoms, which was found to be 4.6 eV. The results were also applied to predict the rate of electron beam induced damage that will occur in InN specimens with different thicknesses. (C) 2003 American Institute of Physics.

引用

页码：859 / 861

页数：3

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