Mass spectral investigation of the plasma phase of a pulsed plasma of acrylic acid

被引：11

作者：

Haddow, DB ^{[1
]}

Beck, AJ ^{[1
]}

France, RM ^{[1
]}

Fraser, S ^{[1
]}

Whittle, JD ^{[1
]}

Short, RD ^{[1
]}

机构：

[1] Dept Mat Engn, Lab Surface & Interface Anal, Sheffield S1 3JD, S Yorkshire, England

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 2000年 / 18卷 / 06期

关键词：

D O I：

10.1116/1.1316099

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The applicability of mass spectrometry to study the low plasma polymerization of acrylic acid was studied. The method alone, could not determine the mechanism of the process, but it gave much information on the plasma environment. In the gas-phase species, the pulsed and equivalent-power continuous-wave plasmas of acrylic acid were found similar. Based on these data and X-ray photoelectron spectroscopy studies of the chemistry of the resulting polymers, the mechanism of the plasma polymerization was deduced.

引用

页码：3008 / 3011

页数：4

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