Application oriented complex polymer microoptics

被引：6

作者：

Braeuer, A ^{[1
]}

Dannberg, P ^{[1
]}

Zeitner, U ^{[1
]}

Mann, G ^{[1
]}

Karthe, W ^{[1
]}

机构：

[1] Fraunhofer Inst Angew Opt & Feinmech IOF Jena, D-07745 Jena, Germany

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2003年 / 9卷 / 05期

关键词：

MICROLENSES;

D O I：

10.1007/S00542-002-0234-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Three technologies for precise microoptical elements with more than one optical function and fabricated on wafer-scale are described. The combination of reflow technology and direct laser beam writing results in hybrid microoptical elements, comprising, e.g. refractive and diffractive elements. Another method, selective uv-replication enables for hybrid integration of microoptical elements and optoelectronic wafers and is demonstrated for microlenses integrated on VCSEL and LED-chips. As the third method, double-sided uv-replicated microoptics used, e.g. for micro-telescopes, is demonstrated.

引用

页码：304 / 307

页数：4

共 5 条

[1] Microsystems and wafer processes for volume production of highly reliable fiber optic components for telecom- and datacom-application [J].

Althaus, HL ;

Gramann, W ;

Panzer, K .

IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY PART B-ADVANCED PACKAGING, 1998, 21 (02) :147-156

[2] Micro-optical elements and their integration to glass and optoelectronic wafers [J].

Dannberg, P ;

Erdmann, L ;

Bierbaum, R ;

Krehl, A ;

Bräuer, A ;

Kley, EB .

MICROSYSTEM TECHNOLOGIES, 1999, 6 (02) :41-47

[3]

DANNBERG P, 1994, MICROSYST TECHNOL, P281

[4] Technique for monolithic fabrication of silicon microlenses with selectable rim angles [J].

Erdmann, L ;

Efferenn, D .

OPTICAL ENGINEERING, 1997, 36 (04) :1094-1098

[5] MICROLENSES FABRICATED BY MELTING A PHOTORESIST ON A BASE LAYER [J].

HASELBECK, S ;

SCHREIBER, H ;

SCHWIDER, J ;

STREIBL, N .

OPTICAL ENGINEERING, 1993, 32 (06) :1322-1324

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