A tunable vibratory microgyroscope

被引：23

作者：

Oh, YS ^{[1
]}

Lee, BL ^{[1
]}

Baek, SS ^{[1
]}

Kim, HS ^{[1
]}

Kim, JG ^{[1
]}

Kang, SJ ^{[1
]}

Song, CM ^{[1
]}

机构：

[1] Samsung Adv Inst Technol, Microsyst Lab, Suwon, South Korea

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 64卷 / 01期

关键词：

surface micromachining; microgyroscopes; tunable gyroscopes; vacuum packaging; quality factor; resonance frequency;

D O I：

10.1016/S0924-4247(98)80057-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A tunable vibratory microgyroscope has been fabricated by surface-micromachining technology. The 7.5 mu m thick polysilicon structural layer is deposited using LPCVD at 625 degrees C. The resonance frequency in the detection mode is designed to be higher than that in the driving mode so that the gyroscope could be matched to the resonance frequencies by applying an inter-plate d.c. bias. The gyroscope is driven in a resonant state by electrostatic force and the output detected is due to a capacitance change between the plate and the polysilicon electrode. The resonance frequencies of the gyroscope in the driving and detection directions are measured to be 10.48 and 10.93 kHz, respectively. The resonance frequency in the detection direction can be shifted to 10.52 kHz by applying a tuning voltage of 4.0 V. The quality factor and resonance frequency of the detection mode are significantly affected by ambient pressure. The electrical noise equivalent rate of this device is about 0.1 degrees s(-1) at 10(-2) torr. (C) 1998 Published by Elsevier Science S.A.

引用

页码：51 / 56

页数：6

共 8 条

[1]

CHOI J, 1995, 13 SENS S TOK JAP, P177

[2]

HASHIMOTO M, 1994, 12TH SENS S OS, P163

[3] Polysilicon integrated microsystems: Technologies and applications [J].

Howe, RT ;

Boser, BE ;

Pisano, AP .

SENSORS AND ACTUATORS A-PHYSICAL, 1996, 56 (1-2) :167-177

[4]

Mochida Y., 1996, Transactions of the Institute of Electrical Engineers of Japan, Part E, V116-E, P283, DOI 10.1541/ieejsmas.116.283

[5]

OH YS, P IEEE MEMS 97 NAG J, P272

[6] Laterally oscillated and force-balanced micro vibratory rate gyroscope supported by fish-hook-shaped springs [J].

Park, KY ;

Lee, CW ;

Oh, YS ;

Cho, YH .

SENSORS AND ACTUATORS A-PHYSICAL, 1998, 64 (01) :69-76

[7]

Putty M. W., 1994, SOL STAT SENS ACT WO, P213

[8]

TANG TK, 1996, SOL STAT SENS ACT WO, P288

← 1 →