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Incoherent X-ray mirror surface metrology
被引：91
作者：
Hignette, O
[1
]
Freund, A
[1
]
Chinchio, E
[1
]
机构：
[1] European Synchrotron Radiat Facil, F-38043 Grenoble, France
来源：
MATERIALS, MANUFACTURING, AND MEASUREMENT FOR SYNCHROTRON RADIATION MIRRORS
|
1997年
/
3152卷
关键词：
surface metrology;
x-ray mirrors;
active optics;
microfocusing;
synchrotron radiation;
multilayers;
D O I：
10.1117/12.295559
中图分类号：
O43 [光学];
学科分类号：
070207 ;
0803 ;
摘要：
In this paper we describe an x-ray long trace profiler (XLTP) that takes an x-ray synchrotron beam as a wavefront reference. According to results of experiments conducted on the Optics Beamline at the ESRF, this instrument allows us to measure surface slope errors with precision and accuracy better than 25 nrad (rms) and 50 mad (rms), respectively, with a lateral resolution of 5 mm in the meridional and less than 1 mm in the sagittal direction. A very similar technique was developed to figure in situ mirrors mounted on mechanical benders into a stigmatic shape for microfocusing purposes. Micron spot sizes were achieved without difficulty and submicron precision should be possible. The technique is particularly useful if energy tunability is needed. The emphasis has been put on automation and speed of the measurement.
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页码：188 / 199
页数：12
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