Operation of KrF and ArF tunable excimer lasers without Cassegrain optics

A commercial tunable excimer laser consists of an oscillator-amplifier combination. The oscillator produces high-quality light that is sent to the amplifier and is distributed throughout the amplifier cavity via Cassegrain optics. We describe here two alternative approaches, a ''single-pass'' configuration for use with KrF and a ''triple-pass'' configuration with ArF, both of which do away with the Cassegrain optics. In each approach, the beam energy is the same as with Cassegrain optics. For KrF, the changes provide better locking, a higher degree of linear polarization, and a better spatial beam homogeneity, but a poorer beam divergence. For ArF, there is also better beam homogeneity, but the locking efficiency and divergence are not as good as with Cassegrain optics.