Sub-ppm sensitivity towards carbon monoxide by means of pulsed laser deposited SnO2:Pt based sensors

被引:49
作者
Dolbec, R. [1 ]
El Khakani, M. A. [1 ]
机构
[1] Inst Natl Rech Sci, INRS Energie Mat & Telecommun, Varennes, PQ J3X 1S2, Canada
基金
加拿大自然科学与工程研究理事会;
关键词
D O I
10.1063/1.2731710
中图分类号
O59 [应用物理学];
学科分类号
摘要
The gas-sensing properties of nanoporous SnO2, SnO2:Pt, and multilayered SnO2:Pt thin films, deposited by pulsed laser deposition, have been investigated towards low concentrations of CO, in dry air. It is shown that SnO2:Pt films presenting an optimal thickness of similar to 400 nm and suitably doped with Pt nanoparticle catalyst are able to detect CO concentrations (C) as low as 100 ppb (parts per 10(9)). Interestingly, the response of the sensor is found to follow a [C](0.75) law over a CO concentration range as wide as 0.1-500 ppm. The multilayered approach developed here is shown to be effective in further improving the sensitivity of the sensors. (c) 2007 American Institute of Physics.
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页数:3
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