Synthesis, characterization and application of nano-structured Mo2C thin films

被引：25

作者：

Chen, HY

Chen, L

Lu, Y

Hong, Q

Chua, HC

Tang, SB

Lin, J

机构：

[1] Natl Univ Singapore, Dept Phys, Singapore 119260, Singapore

[2] Natl Univ Singapore, Chem & Proc Engn Ctr, Singapore 119260, Singapore

来源：

CATALYSIS TODAY | 2004年 / 96卷 / 03期

关键词：

nano-structure; thin films; MOCVD; Mo(2)C; MO(CO)(6);

D O I：

10.1016/j.cattod.2004.06.116

中图分类号：

O69 [应用化学];

学科分类号：

081704 ;

摘要：

Nano-structured Mo(2)C thin films were grown on Si(100) by metal-organic chemical vapor deposition using MO(CO)(6) as precursor. Well crystalline thin films could be synthesized only in the case where the precursor vapor was present before deposition temperature was rapidly reached. A reaction scheme is postulated. The formation of benzene from methane over the nano-structured Mo films has been observed in micro-reactor studies and confirms that Mo(2)C + MoO(3) are an active catalyst for methane conversion. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：161 / 164

页数：4

共 11 条

[1]

CHANG CY, 1996, ULSI TECHNOLOGY, P144

[2]

Cotton F.A., 1988, ADV INORG CHEM

[3]

GONCHAROVA SN, 1995, PREPARATION CATALYST, V6, P915

[4] New model catalysts: Uniform platinum cluster arrays produced by electron beam lithography [J].