Parallel-plate MEMS mirror design for large on-resonance displacement

被引：4

作者：

Bhalotra, SR ^{[1
]}

Mansell, JD ^{[1
]}

Kung, HL ^{[1
]}

Miller, DAB ^{[1
]}

机构：

[1] Stanford Univ, Edward L Ginzton Lab, Stanford, CA 94305 USA

来源：

2000 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS | 2000年

关键词：

D O I：

10.1109/OMEMS.2000.879642

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present an electrostatically actuated MEMS mirror with 65 mum of displacement. This design provides a 2 mm square reflective surface and allows for easy fabrication, making it suitable for a wide range of applications.

引用

页码：93 / 94

页数：2

共 4 条

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[2]

LIU C, 1999, IEEE T MAGN, V35, P1976

[3] Miniaturized time-scanning Fourier transform spectrometer based on silicon technology [J].

Manzardo, O ;

Herzig, HP ;

Marxer, CR ;

de Rooij, NF .

OPTICS LETTERS, 1999, 24 (23) :1705-1707

[4]

MOHR J, 1993, 7 INT C SOL STAT SEN, P120

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