Depth profile analysis with monolayer resolution using elastic recoil detection (ERD)

被引：26

作者：

Dollinger, G ^{[1
]}

Frey, CM ^{[1
]}

Bergmaier, A ^{[1
]}

Faestermann, T ^{[1
]}

机构：

[1] Tech Univ Munich, Phys Dept E12, D-85747 Garching, Germany

来源：

EUROPHYSICS LETTERS | 1998年 / 42卷 / 01期

关键词：

D O I：

10.1209/epl/i1998-00547-6

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The conditions for obtaining optimum depth resolution in elastic recoil detection (ERD) analysis of thin films using high-energy heavy ions are investigated. We estimate the principle limits given by energy straggling and small-angle scattering effects and show that monolayer depth resolution can be expected under optimized experimental conditions. Such a resolution is demonstrated in an ERD experiment for the first time by discrete signals of adjacent (002) graphite layers which is obtained using a 60 MeV I-127(23+) ion beam and detecting C-12(5+) recoils with a magnetic spectrograph.

引用

页码：25 / 30

页数：6

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