Lecture notes on radio-frequency discharges, dc potentials, ion and electron energy distributions

被引：30

作者：

Goedheer, WJ ^{[1
]}

机构：

[1] EURATOM, FOM, Inst Plasmaphys, NL-3430 BE Nieuwegein, Netherlands

来源：

PLASMA SOURCES SCIENCE & TECHNOLOGY | 2000年 / 9卷 / 04期

关键词：

D O I：

10.1088/0963-0252/9/4/306

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

These notes are meant as a first introduction into the physics of capacitively coupled radio-frequency discharges for people that are about to start or have just started research involving gas discharges. The scope is limited to the basic electrical characteristics and to the behaviour of the positive ions and electrons in the discharge.

引用

页码：507 / 516

页数：10

共 16 条

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