The use of ferrofluids in micromechanics

被引：64

作者：

Pérez-Castillejos, R

Plaza, JA

Esteve, J

Losantos, P

Acero, MC

Cané, C

Serra-Mestres, F

机构：

[1] Ctro. Nac. Microelectronica (CNM) C., Campus UAB

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2000年 / 84卷 / 1-2期

关键词：

ferrofluids; magnetic microactuators; microfluidics;

D O I：

10.1016/S0924-4247(99)00318-0

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An introduction to ferrofluids in MEMS applications is presented. Ferrofluids are fluids with magnetic properties. By applying a magnetic field, the balance of forces within the ferrofluid is varied so that the magnetic fluid can move or apply pressure. These capabilities can be used in the field of the microsystems. In this work we have obtained the typical values of pressure which can be expected from a ferrofluid. Using a piezoresistive pressure sensor, a pressure of 0.04 bar has been obtained. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：176 / 180

页数：5