Microfabricated suspensions for electrical connections on the tunable elastomer membrane

被引：47

作者：

Hung, PJ ^{[1
]}

Jeong, KH ^{[1
]}

Liu, GL ^{[1
]}

Lee, LP ^{[1
]}

机构：

[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA

来源：

APPLIED PHYSICS LETTERS | 2004年 / 85卷 / 24期

关键词：

D O I：

10.1063/1.1835553

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Electrical connections through microfabricated suspensions on a pneumatically pumped elastomer membrane were demonstrated. A method to fabricate the suspensions on the elastomer membrane was developed. The elastomer membrane was 1 mm in diameter and 120 mum in thickness. Resistances of the microfabricated suspensions measured across the elastomer membrane were within 1% difference when the membrane's center deflection ranged from 0 to 100 mum, which corresponded to a numerical aperture change from 0 to 0.2 as well as a 2.6% elongation of the elastomer. (C) 2004 American Institute of Physics.

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页码：6051 / 6053

页数：3

相关论文

共 13 条

[1]

Armani D., 1998, 12 INT C MEMS MEMS 9, V99, P222

[2] Spontaneous formation of ordered structures in thin films of metals supported on an elastomeric polymer [J].

Bowden, N ;

Brittain, S ;

Evans, AG ;

Hutchinson, JW ;

Whitesides, GM .

NATURE, 1998, 393 (6681) :146-149

[3] Tunable liquid-filled microlens array integrated with microfluidic network [J].

Chronis, N ;

Liu, GL ;

Jeong, KH ;

Lee, LP .

OPTICS EXPRESS, 2003, 11 (19) :2370-2378

[4] Rapid prototyping of microfluidic systems in poly(dimethylsiloxane) [J].

Duffy, DC ;

McDonald, JC ;

Schueller, OJA ;

Whitesides, GM .

ANALYTICAL CHEMISTRY, 1998, 70 (23) :4974-4984

[5]

Fedder GK., 1994, Simulation of microelectromechanical systems

[6]

HOFFMAN E, 1995, MICRO ELECTRO MECHANICAL SYSTEMS - IEEE PROCEEDINGS, 1995, P288, DOI 10.1109/MEMSYS.1995.472608

[7] FEATURES OF GOLD HAVING MICROMETER TO CENTIMETER DIMENSIONS CAN BE FORMED THROUGH A COMBINATION OF STAMPING WITH AN ELASTOMERIC STAMP AND AN ALKANETHIOL INK FOLLOWED BY CHEMICAL ETCHING [J].

KUMAR, A ;

WHITESIDES, GM .

APPLIED PHYSICS LETTERS, 1993, 63 (14) :2002-2004

[8] Stretchable gold conductors on elastomeric substrates [J].

Lacour, SP ;

Wagner, S ;

Huang, ZY ;

Suo, Z .

APPLIED PHYSICS LETTERS, 2003, 82 (15) :2404-2406

[9] Soft, conformable electrical contacts for organic semiconductors: High-resolution plastic circuits by lamination [J].

Loo, YL ;

Someya, T ;

Baldwin, KW ;

Bao, ZN ;

Ho, P ;

Dodabalapur, A ;

Katz, HE ;

Rogers, JA .

PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2002, 99 (16) :10252-10256

[10] Poly(dimethylsiloxane) as a material for fabricating microfluidic devices [J].

McDonald, JC ;

Whitesides, GM .

ACCOUNTS OF CHEMICAL RESEARCH, 2002, 35 (07) :491-499