Mechanical properties of DLC films prepared inside of micro-holes by pulse plasma CVD

被引：39

作者：

Yang, XD

Saito, T

Nakamura, Y

Kondo, Y

Ohtake, N

机构：

[1] Tokyo Inst Technol, Dept Mech Sci & Engn, Meguro Ku, Tokyo 1528552, Japan

[2] NGK INSULATORS LTD, Nagoya, Aichi, Japan

来源：

关键词：

diamond-like carbon; pulse plasma CVD; micro-extrusion die; micro-coating;

D O I：

10.1016/j.diamond.2004.06.036

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond-like carbon (DLC) films are metastable amorphous carbon materials with superior tribological characteristics. In order to improve wear resistance of micro-extrusion dies with numerous imperceptible holes, DLC films were deposited on the inner wall surface of model dies with holes of 2 and 0.9 min in diameter, and 20 min in depth by using pulse plasma CVD method. This paper will discuss how argon gas, deposition pressure and time affect the characteristics of films deposited on the inner wall surface of dies. This micro-coating method can be applied widely for inner wall surface treatment of components with thin holes. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：1984 / 1988

页数：5

共 5 条

[1] Applications of diamond-like carbon thin films [J].