Frequency-tunable micromechanical oscillator

被引：40

作者：

Zalalutdinov, M ^{[1
]}

Ilic, B ^{[1
]}

Czaplewski, D ^{[1
]}

Zehnder, A ^{[1
]}

Craighead, HG ^{[1
]}

Parpia, JM ^{[1
]}

机构：

[1] Cornell Ctr Mat Res, Ithaca, NY 14853 USA

来源：

APPLIED PHYSICS LETTERS | 2000年 / 77卷 / 20期

关键词：

D O I：

10.1063/1.1326035

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An experimental method, employing a scanning tunneling microscope (STM) as an actuator and a scanning electron microscope (SEM) as a motion detector, was developed to study microelectromechanical systems (MEMS) and has been applied to study microfabricated cantilever beams. Vibrations actuated by an ac voltage applied to the piezodrive are transferred to the sample by the STM tip, which also provides a constraint at the drive location, altering the fundamental mode of the oscillation. A continuous change in the resonant frequency of the cantilever is achieved by varying the position of the STM tip. In contrast to the few percent tunability previously demonstrated for MEMS oscillators, we have varied the cantilever frequency over a 300% range. (C) 2000 American Institute of Physics. [S0003-6951(00)03146-6].

引用

页码：3287 / 3289

页数：3

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