Optimization of zinc oxide thin film for surface acoustic wave filters by radio frequency sputtering

被引：136

作者：

Yoshino, Y ^{[1
]}

Makino, T

Katayama, Y

Hata, T

机构：

[1] Kanazawa Univ, Grad Sch Nat Sci & Technol, Kanazawa, Ishikawa 9208667, Japan

[2] Murata Mfg Co Ltd, R&D Div, Shiga 5202393, Japan

来源：

VACUUM | 2000年 / 59卷 / 2-3期

关键词：

D O I：

10.1016/S0042-207X(00)00313-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Electrical characteristics of zinc oxide (ZnO)/glass surface acoustic wave (SAW) filters, the structure of which is ZnO thin film on a glass substrate with aluminum inter digital transducers, are greatly influenced by deposition parameters of a radio frequency sputtering for making ZnO thin films, The deposition conditions for making the ZnO thin film an also considered to obtain good piezoelectricity for SAW devices. Oxygen concentration in the radio frequency sputtering greatly affects the properties of ZnO thin films. The interface microstructure of ZnO thin films is investigated by cross-section transmission electron spectroscopy. The growth figures of ZnO on glass and ZnO on Al are similar. The average crystal size of ZnO on glass is larger than that of ZnO on Al. (C) 2000 Elsevier Science Ltd. All rights reserved.

引用

页码：538 / 545

页数：8

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